[Welcome] New faculty member(Prof. Soo-Hyun Kim)
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Soo-Hyun
Kim, Ph.D. is a professor in the graduate school of semiconductor materials and
devices engineering and in the department of materials science and engineering
at the Ulsan National Institute of Science and Technology (UNIST).
His
main research interests include the developments of the process technology for
nanoscale thin films and nano-materials using atomic layer deposition (ALD) and
area-selective ALD (AS-ALD), and their applications into the advanced Cu metallization
and emerging interconnects technology for semiconductor devices. Before joining
to UNIST in 2022, he was a Professor in the school of materials science and
engineering at Yeungnam University from 2007. He also served as a visiting
professor in the department of chemistry and chemical biology at Harvard
University, USA from 2012 to 2013 and technology consulting professor for SK
Hynix Semiconductor from 2019 to 2020. Prior to joining Yeungnam University, he
was employed at the R&D Division of Hynix Semiconductor (Currently, SK
Hynix Semiconductor) from 2003 to 2007. During this time, he developed the metallization
processes for the memory devices including ALD-WN, ALD-W, low-Cb bit
line, Cu metallization for DRAM etc. Professor Kim is an author of more than 170
technical publications and filed or awarded more than 30 U.S or Korean patents
related to Cu metallization and ALD technology etc. He is also one of the
authors on the book titled by “Atomic
Layer Deposition for Semiconductors, Chapter 8”. From 2014, he has been an
Asian committee member of international interconnect technology conference
(IITC) and served as a general co-chair of 2017 IITC conference held at
Hsinchu, Taiwan and 2020 IITC conference at San Jose, USA (virtual). Prof. Kim
received B.S. (1997), M.S degrees (1999) in metallurgical engineering, and Ph.D.
degree (2003) in materials science and engineering at Seoul National
University, Korea.